On Scheduling a Photolithography Area Containing Cluster Tools
Publication Year: 2018
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[PDF] [External Link]
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[PDF] [External Link]
Madathil, S.C., Mason, S.J., Kurz, M.E., July 2018, “On Scheduling a Photolithography Area Containing Cluster Tools”, Computers and Industrial Engineering, Vol. 121, 177-188.