Madathil, S.C., Mason, S.J., Kurz, M.E., July 2018, “On Scheduling a Photolithography Area Containing Cluster Tools”, Computers and Industrial Engineering, Vol. 121, 177-188.
/wp-content/themes/awp-enfold/blank.png00Academic Web Pages/wp-content/themes/awp-enfold/blank.pngAcademic Web Pages2018-07-01 00:00:002021-06-21 20:17:12On Scheduling a Photolithography Area Containing Cluster Tools
Dr. Mary E. Kurz
Department of Industrial Engineering
Clemson University firstname.lastname@example.org